Superconducting Y-Ba-Cu-O Oxide Films by OMCVD
Abstract
Formation of Y-Ba-Cu-O films have been attempted by the organometallic chemical vapor deposition (OMCVD) method using Y(thd)3, Ba(thd)2, and Cu(thd)2 (thd=2,2,6,6,-tetramethyl-3,5-heptanedione), which are organic metal chelates, as gas sources. The results of electron probe microanalysis (EPMA) show that the film formed has a composition similar to that of YBa2Cu3Ox ceramics. The film has a high resistivity in the as-deposited state. If the film is conditioned at 950°C for 30 minutes, the resistivity reduces extremely, providing a superconductivity. Tc onset is 76 K and Tc final is 60 K.
- Publication:
-
Japanese Journal of Applied Physics
- Pub Date:
- July 1988
- DOI:
- 10.1143/JJAP.27.L1265
- Bibcode:
- 1988JaJAP..27L1265N
- Keywords:
-
- High Temperature Superconductors;
- Mixed Oxides;
- Oxide Films;
- Superconducting Films;
- Thin Films;
- Vapor Deposition;
- Yttrium Oxides;
- Annealing;
- Barium Oxides;
- Copper Oxides;
- Microstructure;
- Organometallic Compounds;
- Temperature Dependence;
- Solid-State Physics