Analysis by electron energy-loss spectroscopy of poly(methylmethacrylate) electron beam resist
Abstract
- Publication:
-
Journal of Vacuum Science Technology B: Microelectronics and Nanometer Structures
- Pub Date:
- November 1988
- DOI:
- 10.1116/1.584092
- Bibcode:
- 1988JVSTB...6.2254M