Formation of YBa2Cu3O7 superconducting films by ion implantation
Abstract
We have fabricated superconducting thin films by ion implanting Y into a base material formed by the coevaporation of BaF2 and Cu. The implantations were carried out at 77 K and resulted in the formation of an amorphous Y-Ba-Cu-F surface layer. Oxygen annealing with the addition of water vapor renders the base material insulating with a room-temperature resistance of 105 Ω. An identical annealing treatment on the Y-implanted material produces a superconductor with an onset temperature of 85 K.
- Publication:
-
Applied Physics Letters
- Pub Date:
- May 1988
- DOI:
- 10.1063/1.99714
- Bibcode:
- 1988ApPhL..52.1729N
- Keywords:
-
- Barium Oxides;
- Copper Oxides;
- High Temperature Superconductors;
- Ion Implantation;
- Superconducting Films;
- Thin Films;
- Yttrium Oxides;
- Annealing;
- Electrical Properties;
- Evaporation;
- Sputtering;
- Solid-State Physics