X-ray studies of strain, interface and impurity in semiconductors
Abstract
Residual strains were measured in As-implanted Si and SiO2/Si heterostructures. Interfacial roughness and surface roughness were measured in several heterostructures. High-temperature superconductors (Y-Ba-Cu-O) are being studied. Wavelength-modulated X-ray spectroscopy is being developed.
- Publication:
-
State Univ. of New York, Stony Brook Report
- Pub Date:
- 1987
- Bibcode:
- 1987suny.rept.....K
- Keywords:
-
- Heterojunctions;
- Impurities;
- Interfaces;
- Roughness;
- Semiconductors (Materials);
- X Ray Analysis;
- Barium Oxides;
- Frequency Modulation;
- High Temperature Superconductors;
- Yttrium Oxides;
- Solid-State Physics