Semiconductor measurement technology: A bibliography of NBS (National Bureau of Standards) publications for the years 1962-1986
Abstract
Reports of work performed at the National Bureau of Standards (NBS) in the field of Semiconductor Measurement Technology are listed. The publications are grouped by author in a given year, with the current year appearing first in the listing. An index by topic area is provided. Each topic is followed by year and reference number of the appropriate publication. For the reader's convenience, a list by author is also given. Most of the publications listed herein resulted from work done as part of the NB Semiconductor Technology Program (STP). The Program serves to focus NBS research on improved measurement technology for the use of the semiconductor device community in specifying materials, equipment, and devices in national and international commerce, and in monitoring and controlling device fabrication and assembly. The research leads to carefully evaluated, well-documented measurement methods, data, reference artifacts, models and theory, and associated technology which when applied by the industry are expected to contribute to higher yields, lower cost, and higher reliability of semiconductor devices and to provide a basis for controlled improvements in fabrication processes and device performance.
- Publication:
-
Unknown
- Pub Date:
- February 1987
- Bibcode:
- 1987smtb.rept.....W
- Keywords:
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- Bibliographies;
- Measuring Instruments;
- Semiconductors (Materials);
- Standards;
- Technology Assessment;
- Industries;
- Low Cost;
- Reliability;
- Research Management;
- Semiconductor Devices;
- Solid-State Physics