Combining scanning tunneling and scanning electron microscopes in a single instrument
Abstract
The general design and performance characteristics of a scanning tunneling microscope designed for the combined operation with a scanning electron microscope are presented. In particular, results are presented for a test specimen, a microbridge made of a niobium film deposited by X-ray microlithography on a silicon substrate. An analysis of the results obtained indicates that the combined instrument can be useful in many electron microscopy applications.
- Publication:
-
Pisma v Zhurnal Tekhnischeskoi Fiziki
- Pub Date:
- October 1987
- Bibcode:
- 1987PZhTF..13.1251V
- Keywords:
-
- Electron Microscopes;
- Electron Tunneling;
- Optical Scanners;
- Scanning Tunneling Microscopy;
- Instrumentation and Photography