Impregnated-electrode-type liquid metal ion source
Abstract
We have developed an impregnated-electrode-type liquid metal ion source whose tip is a sintered-porous structure made of a refractory metal such as tungsten. By this structure the ratio of the liquid metal surface area facing the vacuum to the volume is low, which decreases useless metal evaporation from the surface. The maximum vapour pressure of the metal in operation for this ion source is 10 -1-10 0 Torr, which is 2-3 orders of magnitude higher than that for the needle type. Therefore, useful metal ions such as Ga +, Au +, Ag +, In +, Si 2+, Ge 2+, and Sb 2+ can be extracted from single element metals or alloys. The porous structure of the tip has also an effect on the positive control of the liquid metal flow rate to the tip head. Thus, a stable operation with a high current of a few hundreds of μA can be obtained together with a low current high brightness ion beam. Therefore, this ion source is suitable not only for microfocusing but also for a general use as a metal ion source.
- Publication:
-
Nuclear Instruments and Methods in Physics Research B
- Pub Date:
- 1987
- DOI:
- 10.1016/0168-583X(87)90822-6
- Bibcode:
- 1987NIMPB..21..186I