Optically excited resonant diaphragm pressure sensor
Abstract
The pressure dependence of the resonant frequency of an optically excited and optically interrogated silicon diaphragm is reported. The fundamental resonant frequency is observed to increase from 121.5 kHz to 162.9 kHz for a pressure change of 0.75 bar. This corresponds to a pressure sensitivity of 0.04 percent/mbar. The observed dependence of frequency on pressure agrees in form with theoretical expectations based on the vibrations of clamped plates.
- Publication:
-
Electronics Letters
- Pub Date:
- February 1987
- DOI:
- 10.1049/el:19870107
- Bibcode:
- 1987ElL....23..152U
- Keywords:
-
- Diaphragms (Mechanics);
- Optical Resonance;
- Pressure Sensors;
- Resonant Frequencies;
- Aluminum Coatings;
- Helium-Neon Lasers;
- Interferometry;
- Radiation Pressure;
- Instrumentation and Photography