Laser evaporation studies
Abstract
The use of a pulsed laser to evaporate dielectric materials for optical thin film deposition was investigated. The electrical properties of the laser induced plasma in the evaporant plume were studied. High flux (20A/sq cm) of high velocity (1 to 10 million) cm/s) ionic species were observed in the TEA-CO2 laser evaporation of many refractory oxides, chalcogenides and fluorides. Thin films of ZrO2 were deposited out of a plasma described above. These films were dense, oriented polycrystalline and had bulk refractive index values (2,15), low absorption (K about 0.001) and low particulate density for a range of laser fluence values. In the next and final phase of this project, thin film studies will be extended to a wider array of materials, with emphasis on obtaining high quality films with low particulate densities.
- Publication:
-
Annual Report
- Pub Date:
- October 1986
- Bibcode:
- 1986rock.rept.....S
- Keywords:
-
- Carbon Dioxide Lasers;
- Dielectrics;
- Evaporation;
- Plasmas (Physics);
- Pulsed Lasers;
- Tea Lasers;
- Thin Films;
- Vapor Deposition;
- Zirconium Oxides;
- Coatings;
- Electrical Properties;
- Fluorides;
- Flux (Rate);
- Laser Applications;
- Particles;
- Refractivity;
- Lasers and Masers