Laser-induced etching
Abstract
Laser-induced etching of metals, semiconductors, and other inorganic materials can be accomplished by ablation, localized heating to enhance a thermally activated chemical reaction, or photogeneration of a good etchant from a less reactive precursor. In addition, semiconductors can be etched following photoexcitation of the surface to produce free carriers. The advantages and disadvantages of these four approaches to laser-induced etching are reviewed in this paper.
- Publication:
-
Presented at the OSA/APS International Laser Science Conference
- Pub Date:
- 1986
- Bibcode:
- 1986lasc.conf.....A
- Keywords:
-
- Etching;
- Laser Outputs;
- Semiconductors (Materials);
- Surface Finishing;
- Ablation;
- Chemical Reactions;
- Excitation;
- Inorganic Compounds;
- Metals;
- Surface Properties;
- Lasers and Masers