Experimental thin film deposition and surface analysis techniques
Abstract
An attempt has been made to present some of the thin-film deposition and surface analysis techniques which may be useful in growing superionic conducting materials. Emphasis is made on the importance of being careful in selecting process parameters and materials in order to produce films with properties outlined in this article. Also, special care should be given to proper consideration of grain boundary effects.
- Publication:
-
Presented at the International Workshop on Ionic Batteries
- Pub Date:
- 1986
- Bibcode:
- 1986ioba.work.....C
- Keywords:
-
- Chemical Analysis;
- Grain Boundaries;
- Structural Analysis;
- Surface Properties;
- Thin Films;
- Vapor Deposition;
- Ion Currents;
- Solid Electrolytes;
- Spraying;
- Sputtering;
- Thermal Stability;
- Solid-State Physics