Infrared thermal particle detection physics
Abstract
Thermal particle detection is a new approach to the detection of generic particulate contaminants on products. The method takes advantage of the low thermal conductivity of a particle/substrate interface by using rapid thermal heating to raise the particle temperature over the temperature of its surroundings. The perturbed particle is then detected by its subsequent thermal emissions with a highly sensitive IR detector. The physics of particle heating and detection both in vacuum and in air is described.
- Publication:
-
Journal of Applied Physics
- Pub Date:
- June 1986
- DOI:
- 10.1063/1.336700
- Bibcode:
- 1986JAP....59.3971U