Hydrogen bonding configurations in silicon nitride films prepared by plasma-enhanced deposition
Abstract
- Publication:
-
Journal of Applied Physics
- Pub Date:
- July 1986
- Bibcode:
- 1986JAP....58..484M
- Keywords:
-
- Hydrogen Bonds;
- Insulators;
- Silicon Nitrides;
- Vapor Deposition;
- Absorption Spectra;
- Annealing;
- Infrared Spectra;
- Plasma Jets;
- Vibrational Spectra;
- Solid-State Physics