Thermal wave imaging with thermoacoustic detection
Abstract
Thermoacoustic imaging is a new technique that permits the detection and imaging of microscopic surface and subsurface features in a sample. A detailed theoretical treatment of the thermoacoustic process is presented, with particular emphasis on the roles of thermal and elastic parameters in both one and three dimensions. Examples are presented of thermoacoustic images obtained with a scanning electron microscope. These include images of subsurface mechanical defects, metallic grains, and grain boundaries, and of dislocation networks and dopant regions in semiconductor crystals.
- Publication:
-
IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control
- Pub Date:
- September 1986
- Bibcode:
- 1986ITUFF..33..516R
- Keywords:
-
- Radiant Heating;
- Temperature Measurement;
- Thermal Mapping;
- Ultrasonic Scanners;
- Laser Heating;
- Photoacoustic Microscopy;
- Instrumentation and Photography