The use of computer aids in IC technology evolution
Abstract
The evolution of computer-aided analysis and modeling of integrated semiconductor devices is traced over the past three decades. Aspects of the device physics and the role of device and process analysis at each phase of development are presented. In the area of device analysis applications, the need for technology-oriented CAD (TCAD) is noted, and a typical example - involving CMOS latchup - is discussed. The emerging area of manufacturing science and the need for accurate process models to support TCAD are examined. Process simulation is posing increased requirements for computation: multiple transient solutions are needed to replicate technology cross sections, and the physical models are becoming more complex, requiring increased matrix solution time. First-order estimates suggest that process simulation time will soon exceed device analysis time.
- Publication:
-
IEEE Proceedings
- Pub Date:
- December 1986
- Bibcode:
- 1986IEEEP..74.1730D
- Keywords:
-
- Cmos;
- Computer Aided Design;
- Integrated Circuits;
- Network Synthesis;
- Technology Assessment;
- Computer Aided Manufacturing;
- Computerized Simulation;
- Latch-Up;
- Microelectronics;
- Electronics and Electrical Engineering