Method of reducing impurity and antisite defects in semiconductor crystal materials, and device and apparatus respectively produced from and utilizing same
Abstract
The surface of a semiconductor crystalline material is exposed to coherent photon radiation at frequencies chosen to resonate both cation and anion dimers of the doping materials during the growth process. The reduction of cations and anions improved crystal purity and results in a reduction of antisite defects.
- Publication:
-
Patent Application Department of the Navy
- Pub Date:
- March 1985
- Bibcode:
- 1985padn.rept.....Y
- Keywords:
-
- Anions;
- Cations;
- Coherent Radiation;
- Crystal Defects;
- Crystal Growth;
- Crystals;
- Dimers;
- Impurities;
- Photons;
- Radiation Effects;
- Semiconductors (Materials);
- Additives;
- Patent Applications;
- Procedures;
- Purity;
- Semiconductor Devices;
- Electronics and Electrical Engineering