Thermodynamic constraints on ion beam mixing of metals on insulators
Abstract
Several different insulating substrates are coated with various metal films and ion beams irradiated using either Xe or Kr ions. These are then examined by Rutherford backscattering spectroscopy and scanning electron microscopy to determine if interfacial mixing has taken place. These results are compared with the sign of the reaction enthalpy of the metal and substrate to test the proposition that metals mix on insulators if the reaction enthalpy is negative and do not mix if it is positive. The enthalpy rule is, in general, valid. Two exceptions are found: Cr on SiO2 and Zr on Al2O3; however, these exceptions contain ambiguous features. Irradiation with a light, reactive ion is found to produce no mixing.
- Publication:
-
Presented at the 2nd Spring Meeting of the Mater. Res. Soc
- Pub Date:
- 1985
- Bibcode:
- 1985mrs..meet.....F
- Keywords:
-
- Constraints;
- Dielectrics;
- Enthalpy;
- Insulators;
- Interfaces;
- Ion Beams;
- Ion Irradiation;
- Krypton;
- Metal Films;
- Metals;
- Mixing;
- Substrates;
- Thermodynamics;
- Xenon;
- Backscattering;
- Electron Microscopy;
- Scanning;
- Spectroscopy;
- Electronics and Electrical Engineering