Pressure transducers made from thin films on silicon
Abstract
Sensor performance and design are optimized using predecessor technologies. The development of the pressure transducer's sensing chip is described. The sputtering of the thin metallic film on the silicon wafer, and the application of photolithographic techniques to the formation of diaphragms and the shaping of the conductors, strain gages, and compensation resistors are examined. The performance of the transducer, including offset, repeatability, hysteresis, thermal response and nonlinearity, and stability, is measured in order to evaluate the usefulness of the design technique. The data reveal that the design procedure produces a highly stable sensor which is applicable for high-performance reliable pressure transducers.
- Publication:
-
31st International Instrumentation Symposium
- Pub Date:
- 1985
- Bibcode:
- 1985isa..symp...47M
- Keywords:
-
- Photolithography;
- Pressure Sensors;
- Silicon;
- Strain Gages;
- Thin Films;
- Aspect Ratio;
- Dynamic Structural Analysis;
- Flat Plates;
- Rectangular Plates;
- Sputtering;
- Instrumentation and Photography