Transient annealing of semiconductors by laser electron-beam and radiant heating techniques
Abstract
Annealing techniques which rely upon transient energy deposition in semiconductors from Q-switched and scanning continuous wave laser, electron beam, ion beam, and other radiant sources are reviewed. Advances achieved using transient annealing methods in fundamental and applied physics are described.
- Publication:
-
NASA STI/Recon Technical Report N
- Pub Date:
- 1985
- Bibcode:
- 1985STIN...8622932C
- Keywords:
-
- Electron Beams;
- Laser Annealing;
- Radiant Heating;
- Semiconductors (Materials);
- Continuous Wave Lasers;
- Ion Beams;
- Q Switched Lasers;
- Technology Assessment;
- Lasers and Masers