Angular distribution of particles sputtered from Cu, Pt and Ge targets by keV Ar + ion bombardment
Abstract
Measurements of angular distributions of material sputtered from polycrystalline copper and platinum and amorphous germanium targets by irradiation with argon ions are reported. The beam energy was varied from 1.25 keV to 320 keV (for Cu and Pt upwards from 10 keV only). All targets yielded an angular distribution more outward peaked than the cosine predicted by collision-cascade theory. The germanium result were well-fitted by cos n distributions with n varying from 1.3 at the lowest to 1.6 at higher energies. The copper and platinum targets yielded distributions of the same general shape superimposed with distinct shoulders indicating preferential ejection along nonrandomly distributed close packed directions typical for a polycrystalline textured target. The measured distributions for germanium are in excellent agreement with the results from recent computer simulations of sputtering.
- Publication:
-
Nuclear Instruments and Methods in Physics Research B
- Pub Date:
- February 1985
- DOI:
- 10.1016/0168-583X(85)90003-5
- Bibcode:
- 1985NIMPB...6..459A