Scanning Optical Fiber Microscope for High Resolution Laser Beam Induced Current Image Observation of Semiconductor Defects
Abstract
A scanning optical fiber microscope, which is composed of an optical microscope equipped with an optical fiber positioning system and a digital image processor, is realized. Laser beam induced current image of defects in a polycrystalline Si solar cell is obtained by this microscope with a spatial resolution of less than 1 μm. High resolution mapping of the deep state in LEC-GaAs is also realized by extrinsic (below band gap) photoexcitation.
- Publication:
-
Japanese Journal of Applied Physics
- Pub Date:
- August 1985
- DOI:
- 10.1143/JJAP.24.L617
- Bibcode:
- 1985JaJAP..24L.617O
- Keywords:
-
- Crystal Defects;
- Fiber Optics;
- Laser Outputs;
- Optical Microscopes;
- P-Type Semiconductors;
- Block Diagrams;
- Electric Current;
- Gallium Arsenides;
- Light Beams;
- Solar Cells;
- Instrumentation and Photography