History of the modern cryopump
Abstract
Fast, clean pumpdown to 10 to the -7th Torr range from high crossover pressure was a luxury a decade ago. Today the manufacturing/equipment engineer has at hand reliable, economical, and maintainable cryopumps alternative to conventional high vacuum pumps. This paper traces the nonliquid cryogen, mechanical refrigeration-supported pump package from its inception to acceptance within IBM.
- Publication:
-
Journal of Vacuum Science Technology A: Vacuum Surfaces and Films
- Pub Date:
- May 1985
- DOI:
- 10.1116/1.573017
- Bibcode:
- 1985JVSTA...3..472B
- Keywords:
-
- Cryopumping;
- Histories;
- Problem Solving;
- Vacuum Pumps;
- Engineering (General)