A New Fabrication Technique for Optoelectronic Integrated Circuits (OEIC's) — The Graded-Step Process — Applied to the Fabrication of AlGaAs / GaAs PIN/FET and PIN/Amplifier Photoreceivers
Abstract
- Publication:
-
Journal of the Electrochemical Society
- Pub Date:
- August 1985
- DOI:
- 10.1149/1.2114268
- Bibcode:
- 1985JElS..132.1996W
- Keywords:
-
- Aluminum Gallium Arsenides;
- Electro-Optics;
- Gallium Arsenides;
- Integrated Circuits;
- Photometers;
- Amplifiers;
- Baking;
- Circuit Diagrams;
- Etching;
- Field Effect Transistors;
- Ion Beams;
- Photodiodes;
- Photomicrographs;
- Electronics and Electrical Engineering