Laser pantography
Abstract
The development of laser pantography (LP) into direct writing processes for making integrated circuits is discussed. Research on ways to fabricate various IC components using LP are reviewed. Improvements made in LP apparatus are briefly examined. Success in these efforts may result in very high performance computers customized for specific applications.
- Publication:
-
Energy Technology Review
- Pub Date:
- December 1985
- Bibcode:
- 1985EnTR........10.
- Keywords:
-
- Integrated Circuits;
- Laser Applications;
- Microelectronics;
- Photolithography;
- Supercomputers;
- Additives;
- Computer Aided Manufacturing;
- Deposition;
- Etching;
- Fabrication;
- Silicon;
- Transistors;
- Electronics and Electrical Engineering