Radio frequency probing apparatus for surface acoustic wave devices
Abstract
Wafer probing apparatus especially adapted to probing surface acoustic wave (SAW) device die such as delay lines is disclosed: the apparatus includes a probe card especially suited to the radio frequency and multiple output nature of a SAW delay line together with a computer-aided electronic system for exciting the delay line and evaluating its output.
- Publication:
-
Patent Application Department of the Air Force
- Pub Date:
- May 1984
- Bibcode:
- 1984pad..rept.....C
- Keywords:
-
- Cards;
- Delay Lines;
- Dies;
- Surface Acoustic Wave Devices;
- Computer Techniques;
- Microelectronics;
- Patent Applications;
- Radio Frequencies;
- Wafers;
- Instrumentation and Photography