Measurement of integrated circuit element dimensions taking into account real etching profile according to diffraction pattern
Abstract
Test diffraction gratings are used to determine linear elements and integrated microcircuits with dimensions approaching one light wavelength and to assess the performance of small topological elements with respect to angular curvature, dimension range and etching conditions were optical means and even electron microscopes are insufficient for objects of approximately 1 micron. Randomly incident diffraction of coherent laser light in relation to grating lines was examined. Fractional spectra for grating elements, taking into account etching slopes are computed. Measurements were made at specific angles of diffraction order intensities, and relatively precise determinations of element dimensions were obtained with a precision of approx. 0.1 micron even for objects smaller than one light wavelength.
- Publication:
-
USSR Rept Electron Elec Eng JPRS UEE
- Pub Date:
- June 1984
- Bibcode:
- 1984RpEEE........7.
- Keywords:
-
- Diffraction Patterns;
- Gratings (Spectra);
- Integrated Circuits;
- Electrical Engineering;
- Electronics;
- Etching;
- Geometrical Theory Of Diffraction;
- Topology;
- Electronics and Electrical Engineering