A new technique for measuring sputtering yields at high energies
Abstract
The use of thin, self-supporting carbon catcher foils allows one to measure sputtering yields in a broad range of materials with high sensitivity. Analyzing the foils with Rutherford forward scattering, we have measured sputtered A1, Si and P surface densities down to 5 × {10 13}/{cm 2} with uncertainties of about 20%.
- Publication:
-
Nuclear Instruments and Methods in Physics Research B
- Pub Date:
- January 1984
- DOI:
- 10.1016/0168-583X(84)90483-X
- Bibcode:
- 1984NIMPB...1..118Q