Direct Observation of AlxGa1-xAs/GaAs Superlattices by REM
Abstract
Cleavage surface of AlxGa1-xAs/GaAs superlattices were observed by reflection electron microscopy using a conventional transmission electron microscopy, and cross sections of the superlattices were clearly shown as stripe patterns. Strain fields around the superlattice were revealed in a REM image. The irregularities in superlattice layers caused by roughness of a substrate surface were found to be relaxed in successive layers.
- Publication:
-
Japanese Journal of Applied Physics
- Pub Date:
- October 1984
- DOI:
- 10.1143/JJAP.23.L806
- Bibcode:
- 1984JaJAP..23L.806Y
- Keywords:
-
- Aluminum Gallium Arsenides;
- Electron Microscopy;
- Gallium Arsenides;
- Lattice Parameters;
- Superlattices;
- Crystallography;
- Incident Radiation;
- Stress Distribution;
- Substrates;
- Solid-State Physics