Laser produced X-rays for high resolution lithography
Abstract
The laser-plasma interaction is characterized to gain an understanding of the spectrum of X-rays emitted by the plasma. The potential use of the radiated X-ray for lithography is explored.
- Publication:
-
Interim Report
- Pub Date:
- January 1983
- Bibcode:
- 1983bclo.rept.....E
- Keywords:
-
- Laser Outputs;
- Lithography;
- Plasmas (Physics);
- X Ray Sources;
- Aluminum;
- Copper;
- High Resolution;
- Integrated Circuits;
- Neodymium Lasers;
- Targets;
- Yag Lasers;
- Lasers and Masers