Preferential sputtering of TiC under keV Ar + ion bombardment: Simultaneous sputtering-ISS measurement with He + and Ar + ions
Abstract
The composition change of the outermost atom layer of TiC(110) under ion bombardment with 1.5-3 keV He + and He + + Ar + ions has been measured by ion scattering spectroscopy with He + ions at different sample temperatures. It has been found that the preferential sputtering of C atoms takes place for both the He + and Ar + ion bombardment, however the preferred sputtering is more pronounced for Ar + ions than for He + ions. The ion bombardment with He + ions at elevated sample temperatures hardly results in any change in surface composition below ≈ 800°C, while Ar + ion bombardment results in C enrichment for elevated temperatures as reported so far.
- Publication:
-
Surface Science Letters
- Pub Date:
- 1983
- DOI:
- 10.1016/0167-2584(83)90693-X
- Bibcode:
- 1983SurSL.134L.500K