Optical properties of "diamondlike" carbon films: An ellipsometric study
Abstract
The index of refraction and extinction coefficient are measured as a function of wavelength from 254 to 633 nm using reflection-null ellipsometry. It is shown that both rf glow-discharge-deposited and ion-beam-sputtered films have the same values of n and k over the measured wavelength range. Calculated values of absorption coefficient indicate that the absorption edge is not reached even at near ultraviolet wavelengths. Thermal cycling up to 500°C does not change the optical properties significantly.
- Publication:
-
Physical Review B
- Pub Date:
- December 1983
- DOI:
- 10.1103/PhysRevB.28.7229
- Bibcode:
- 1983PhRvB..28.7229K