A discharge-pumped repetitively pulsed excimer laser
Abstract
A discharge-pumped repetitively pulsed excimer laser has been developed whose efficiency is about 1%. At a pulse repetition rate of 100 Hz, and pulse energies of 75 mJ and 100 mJ have been achieved for XeCl XeF, respectively. The pulse power and pulse energy of the XeF and XeCl lasers generating at wavelengths of 350 and 308 nm, respectively, are plotted as a function of the laser mixture composition and pressure.
- Publication:
-
Eesti NSV Teaduste Akadeemia Toimetised Fuusika Matemaatika
- Pub Date:
- 1983
- Bibcode:
- 1983ETATF..32..109V
- Keywords:
-
- Excimer Lasers;
- Pulsed Lasers;
- Rare Gas-Halide Lasers;
- Laser Materials;
- Rlc Circuits;
- Xenon Chloride Lasers;
- Xenon Fluoride Lasers;
- Lasers and Masers