High density circuit technology
Abstract
An accurate study and evaluation of dielectric thin films is conducted in order to find the material or combination of materials which would optimize NASA'S double layer metal process. Emphasis is placed on polyimide dielectrics because of their reported outstanding dielectric characteristics (including electrical, chemical, thermal, and mechanical) and ease of processing, as well as their rapid acceptance by the semiconductor industry.
- Publication:
-
Final Contract Report Mississippi State Univ
- Pub Date:
- March 1982
- Bibcode:
- 1982msu..reptT....W
- Keywords:
-
- Dielectric Properties;
- Dielectrics;
- Manufacturing;
- Semiconductors (Materials);
- Thin Films;
- Very Large Scale Integration;
- Adhesion Tests;
- Electron Microscopy;
- Performance Tests;
- Service Life;
- Test Pattern Generators;
- Wafers;
- Electronics and Electrical Engineering