Arc suppression in excimer laser discharges
Abstract
An examination has been conducted of the role of the electrode surface finish, discharge sheaths and plasma stability in arc formation in excimer lasers. The investigations provide new insight into the stability behavior of XeF laser discharges. A simple stability criterion is identified and used to define the stable experimental parameter regimes. This criterion predicts that arc suppression for XeF laser discharges can be attained by the removal of anode surface flaws greater than 2 microns and by operating at a gas density greater than 3 amagat.
- Publication:
-
Lasers 1981
- Pub Date:
- 1982
- Bibcode:
- 1982lase.conf...33D
- Keywords:
-
- Arc Discharges;
- Excimer Lasers;
- Magnetohydrodynamic Stability;
- Surface Finishing;
- Xenon Fluoride Lasers;
- Gas Density;
- Laser Outputs;
- Power Efficiency;
- Solid Electrodes;
- Lasers and Masers