Damage thresholds of thin film materials and high reflectors at 248 nm

Twenty-ns, 248-nm KrF laser pulses were used to measure laser damage thresholds for halfway-thick layers of 15 oxide and fluoride coating materials, and for high reflectance coatings made with 13 combinations of these materials. The damage thresholds of the reflectors and single-layer films were compared to measurements of several properties of the halfway-thick films to determine whether measurements of these properties of single-layer films to determine whether measurements of these properties of single-layer films were useful for identifying materials for fabrication of damage resistant coatings.