VLSI electronics microstructure science. Volume 5
Abstract
The state of the art in VLSI technology is assessed, as are trends for future progress and the empirical and theoretical data base which will support that progress. Techniques and machinery for automation in VLSI device manufacturing are described, together with Si material properties of use in VLSI. Practices in high-performance computer packaging are delineated, along with features of the thin-film multichip module. Nanometer-scale fabrication techniques are surveyed, and high-density CCD memories are detailed. Consideration is also devoted to solid-state IR imaging, the impact of microelectronics on radar systems, and the quantum mechanical limitations on device performance. Finally, an investigation is performed of materials science, chemistry, and physics at small dimensions. No individual items are abstracted in this volume
- Publication:
-
NASA STI/Recon Technical Report A
- Pub Date:
- 1982
- Bibcode:
- 1982STIA...8415289E
- Keywords:
-
- Electronics;
- Materials Science;
- Microstructure;
- Technology Assessment;
- Very Large Scale Integration;
- Automation;
- Charge Coupled Devices;
- Fabrication;
- Infrared Imagery;
- Microelectronics;
- Quantum Mechanics;
- Radar Equipment;
- Silicon;
- Solid State Devices;
- Thin Films;
- Electronics and Electrical Engineering