Self-align implantation for n/+/-layer technology /SAINT/ for high-speed GaAs ICs
Abstract
- Publication:
-
Electronics Letters
- Pub Date:
- February 1982
- DOI:
- 10.1049/el:19820080
- Bibcode:
- 1982ElL....18..119Y
- Keywords:
-
- Gallium Arsenides;
- Ion Implantation;
- N-Type Semiconductors;
- Self Alignment;
- Vhsic (Circuits);
- Volt-Ampere Characteristics;
- Contact Resistance;
- Digital Systems;
- Field Effect Transistors;
- Logic Circuits;
- Schottky Diodes;
- Time Lag;
- Electronics and Electrical Engineering