Workshop on the interaction of laser radiation with surfaces for application to microelectronics
Abstract
A workshop was held which was devoted to the physics and chemistry of new optical processing and analysis techniques on surfaces for materials and structures of interest in microelectronics. It contained tutorial papers on topics of general interest to this technical area and reviewed progress in ongoing research. In addition, selected short talks describing recent results were presented. The workshop included talks from various groups throughout the United States and Europe.
- Publication:
-
Workshop held in Cambridge
- Pub Date:
- October 1981
- Bibcode:
- 1981cammawork....4O
- Keywords:
-
- Irradiation;
- Laser Applications;
- Microelectronics;
- Surface Reactions;
- Vapor Deposition;
- Abstracts;
- Etching;
- Metal Surfaces;
- Plating;
- Semiconductors (Materials);
- Thin Films;
- Lasers and Masers