Thermal-desorption measurements for estimating bakeout characteristics of vacuum devices
Abstract
This discussion will be confined to outgassing phenomena; although gettering (sinks) or permeation (transfer through the entire vacuum wall) are imported in long term prediction. Measuring outgassing rates directly is complicated by the dynamic interaction between the samples being measured and the apparatus in which the measurements are made. Thermoesorption data are presented for molybdenum, nickel, Fe-Ni-Co alloy, copper, Cu-Be alloy, molybdenum sealing glass ceramic, and high-alumina ceramic.
- Publication:
-
Presented at Am. Vacuum Soc. Natl. Symp
- Pub Date:
- November 1981
- Bibcode:
- 1981avs..confR....B
- Keywords:
-
- Desorption;
- Evolution (Liberation);
- Outgassing;
- Vacuum;
- Vacuum Apparatus;
- Adsorption;
- Ceramics;
- Copper Alloys;
- Gas Evolution;
- Getters;
- Iron Alloys;
- Molybdenum;
- Nickel;
- Instrumentation and Photography