Thin-film thickness measurement using X-ray peak ratioing in the scanning electron microscope
Abstract
Laser target film thickness was measured by a scanning electron microscope. This method is generally applicable to any coating on any substrate as long as the electron energy is sufficient to penetrate the coating and the substrate produces an X-ray signal which can pass back through the coating and be detected.
- Publication:
-
Presented at Am. Vacuum Soc. Natl. Symp
- Pub Date:
- 1981
- Bibcode:
- 1981avs..conf.....E
- Keywords:
-
- Coatings;
- Electron Microscopes;
- Film Thickness;
- Laser Targets;
- Scanning;
- Surface Energy;
- Thin Films;
- Electron Energy;
- Energy Absorption Films;
- Microanalysis;
- Instrumentation and Photography