Semiconductor measurement technology: Test patterns NBS-28 and NBS-28A: Random fault interconnect step coverage and other structures
Abstract
Microelectronic test structures for detection of random faults in interconnect step coverage are described. Particular attention is given to associated process and physical analysis test structures included in two test patterns, NBS-28 and NBS-28A. Information about the geometry and application of the test structures in these two test patterns is provided.
- Publication:
-
NASA STI/Recon Technical Report N
- Pub Date:
- March 1981
- Bibcode:
- 1981STIN...8130384M
- Keywords:
-
- Failure Analysis;
- Microelectronics;
- Semiconductor Devices;
- Fault Tolerance;
- Gates (Circuits);
- Metal Oxide Semiconductors;
- Electronics and Electrical Engineering