Gauge calibration system based on piston manometer
Abstract
An unbaked calibration system is described that permits absolute calibration with a piston manometer in the range 0.0002 to 6 Pa, with a probable error of 5 microPa + 0.8%, or in the range 0.00008 to 0.02 Pa, with a probable error of 2 microPa + 1%. Procedures and techniques that permit this performance are detailed. For hot-cathode ion gauges, the magnitudes of systematic corrections for envelope temperature and grid current are also indicated.
- Publication:
-
Journal of Vacuum Science Technology
- Pub Date:
- August 1981
- DOI:
- Bibcode:
- 1981JVST...19..243W
- Keywords:
-
- Calibrating;
- Manometers;
- Vacuum Gages;
- Vacuum Systems;
- Dynamometers;
- Gas Valves;
- Pistons;
- Pressure Ratio;
- Random Errors;
- Instrumentation and Photography