200 W KrF gas transport laser
Abstract
The design and performance of a high-average-power high-pulse-rate closed-cycle KrF laser are described. This gas transport laser has generated over 200 W of average power at 249 nm while operating at a pulse repetition rate of 1 kHz; this is the highest average excimer laser power reported to date. Relative laser output power is considered as a function of time for operation at various pulse repetition rates. In addition, the average laser output power is plotted as a function of pulse repetition rate for various PFN charge voltages.
- Publication:
-
IEEE Journal of Quantum Electronics
- Pub Date:
- November 1980
- DOI:
- 10.1109/JQE.1980.1070381
- Bibcode:
- 1980IJQE...16.1260F
- Keywords:
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- Gas Transport;
- High Power Lasers;
- Krypton Fluoride Lasers;
- Laser Outputs;
- Pulsed Lasers;
- Closed Cycles;
- Gas Lasers;
- Lasers and Masers