Ion beam oxidation of Nb-based Josephson junctions
Abstract
- Publication:
-
Electronics Letters
- Pub Date:
- October 1980
- DOI:
- 10.1049/el:19800604
- Bibcode:
- 1980ElL....16..850H
- Keywords:
-
- Ion Beams;
- Josephson Junctions;
- Niobium;
- Oxidation;
- Deposition;
- Electric Current;
- Etching;
- Fabrication;
- Sputtering;
- Electronics and Electrical Engineering