Charge-coupled devices and systems
Abstract
The volume covers the physics and technology of charge-coupled devices together with applications to electronic engineering, including signal processing, memory devices, and imaging systems. The basic principles of surface-channel and buried-channel CCDs, their operation, performance modeling, and performance-limiting factors are discussed and illustrated by examples; the cost and performance of CCD systems are analyzed in comparison to other types of semiconductor devices. The fabrication technologies of CCDs are discussed with reference to shadow mask metal deposition, overlapping electrodes, stepped oxides, and implanted ions, as well as process optimization, and integration of peripheral components.
- Publication:
-
Chichester
- Pub Date:
- 1979
- Bibcode:
- 1979wi...book.....H
- Keywords:
-
- Charge Coupled Devices;
- Chips (Memory Devices);
- Fabrication;
- Imaging Techniques;
- Signal Processing;
- Solid State Physics;
- Technology Utilization;
- Cost Effectiveness;
- Image Transducers;
- Infrared Imagery;
- Ion Implantation;
- Performance Prediction;
- Production Engineering;
- Remote Sensors;
- System Effectiveness;
- Systems Engineering;
- Electronics and Electrical Engineering