CMOS/SOS test patterns for process evaluation and control
Abstract
The National Bureau of Standards in collaboration with the Jet Propulsion Laboratory, Pasadena, CA and RCA, Somerville, NJ, has designed a CMOS/SOS test pattern, NBS-16, and the necessary measurement techniques. The NBS-16 test pattern was designed, a pattern generator tape was designed, a pattern generator tape was delivered to RCA, and the testing hardware and software was developed. A program schedule and a description and illustration of each test structure are presented.
- Publication:
-
Annual Report
- Pub Date:
- January 1979
- Bibcode:
- 1979nbs..reptQ....L
- Keywords:
-
- Cmos;
- Computer Graphics;
- Electronic Equipment Tests;
- Integrated Circuits;
- Radiation Hardening;
- Chips (Electronics);
- Computer Programs;
- Microprocessors;
- Electronics and Electrical Engineering