Process variable dependence and interrelationship between avalanche injected and radiation induced carrier trapping in thermal oxides
Abstract
Progress to data includes the completion of the automated avalanche carrier injection and trapping system, the preparation of samples to study hole and electron trapping in dry as well as wet oxides, and the measurements of the effects of various process parameters on the trapping characteristics of thermal silicon dioxide.
- Publication:
-
Progress Report
- Pub Date:
- October 1979
- Bibcode:
- 1979fcic.rept......
- Keywords:
-
- Charge Carriers;
- Charged Particles;
- Silicon Dioxide;
- Trapped Particles;
- Annealing;
- Electron Density (Concentration);
- N-Type Semiconductors;
- Electronics and Electrical Engineering