Surface roughness measurement of aspheric surfaces
Abstract
A method of measuring the surface roughness of aspheric surfaces is described. The method combines surface replication techniques and FECO (fringes of equal chromatic order) interferometry to provide a relatively simple way of obtaining numerous surface roughness measurements of uncoated aspheric surfaces during final polishing. A series of measurements was carried out on a 30-A calibration sample over a long period of time and gave an average measured surface roughness by replication of 33 A + or - 8 A.
- Publication:
-
Space optics: Imaging X-ray optics workshop
- Pub Date:
- January 1979
- DOI:
- 10.1117/12.957448
- Bibcode:
- 1979SPIE..184..176L
- Keywords:
-
- Asphericity;
- Diffraction Patterns;
- Interferometry;
- Optical Measurement;
- Surface Roughness;
- X Ray Telescopes;
- Heao 2;
- Mirrors;
- Polishing;
- Spaceborne Telescopes;
- Surface Finishing;
- Instrumentation and Photography