Quantitative compositional mapping with the electron microprobe
Abstract
The standard electron microprobe produces two-dimensional images of elemental distributions by displaying X-ray photon-caused pulses on a cathode ray tube screen as the electron beam scans the sample. The usefulness of the microprobe, diminished by this inaccurate qualitative elemental recording method, increases significantly with quantification of two-dimensionally collected X-ray intensities. Standards, scanned in the same manner as analytes, give a grid of X-ray intensities defining a least-squares fitted surface to compensate for areal defocusing of the spectrometers, and to quantify sample composition. Compositional mapping enhances the probe's sensitivity and utility over conventional use.
- Publication:
-
Ph.D. Thesis
- Pub Date:
- February 1979
- Bibcode:
- 1979PhDT........23J
- Keywords:
-
- Computer Graphics;
- Data Acquisition;
- Electron Beams;
- Mapping;
- Quantitative Analysis;
- X Ray Spectroscopy;
- Absorptivity;
- Circuits;
- Data Smoothing;
- Plotters;
- Instrumentation and Photography