Electrostatic damage susceptibility of semiconductor devices
Abstract
Various semiconductor devices were tested for susceptibility to electrostatic discharge (ESD). A circuit similar to the ESD test circuit described in Military Specification MIL-M-38510 slash sheets was used for testing. Devices were also subjected to ESD levels equivalent to 75 percent of the device ESD degradation threshold and then burned-in to see if low-level ESD affects device reliability in system use. A ranking of devices in terms of ESD susceptibility and failure rate during burn-in is provided.
- Publication:
-
Reliability Physics 1978
- Pub Date:
- 1978
- Bibcode:
- 1978reph.proc..151S
- Keywords:
-
- Component Reliability;
- Electric Discharges;
- Electrostatics;
- Failure Analysis;
- Semiconductor Devices;
- Electronic Equipment Tests;
- Performance Tests;
- Test Equipment;
- Thresholds;
- Waveforms;
- Electronics and Electrical Engineering